Semiconductor industry

The working principle of infrared heating lamps in the semiconductor industry: the heating element (such as tungsten filament, ceramic) is powered on to heat up to 500-1500℃, radiating infrared electromagnetic waves, which are absorbed by the wafer material (silicon, photoresist, etc.) and converted into molecular thermal motion energy to achieve non-contact heating. The temperature control system adjusts the power in real time, and accurately controls the temperature according to the absorption characteristics of the material for different wavelengths (near/mid-infrared), meeting the process requirements of rapid heat treatment, thin film annealing, etc., and has the characteristics of uniform heating, fast response, and high cleanliness.

We encourage innovative thinking and continuously seek improvement and breakthroughs to meet customer needs and lead industry development.

We can customize the matching lamp type suitable for your R&D innovation according to your needs, cooperate with your R&D innovation and workshop process upgrade, and keep up with the ever-changing market trends.

Infraered Lamp Solutions

Application of IR lamps in Semiconductor Industry

The application of infrared heating technology can improve the growth rate and quality of wafers, enhance the manufacturing performance and stability of semiconductor equipment, and promote the continuous improvement of semiconductor production and international market competitiveness. With the continuous development and improvement of infrared heating technology, infrared heating technology is widely used in battery manufacturing, semiconductor manufacturing, electronic component manufacturing, ceramic processing and other industries.